Surface effects in a capacitive argon discharge in the intermediate pressure regime

نویسندگان

چکیده

Abstract One-dimensional particle-in-cell/Monte Carlo collisional simulations are performed on a capacitive 2.54 cm gap, 1.6 Torr argon discharge driven by sinusoidal rf current density amplitude of 50 A m ?2 at 13.56 MHz. The excited states (metastable levels, resonance and the 4p manifold) modeled self-consistently with particle dynamics as space- time-varying fluids. Four cases examined, including neglecting states, using either fixed or energy-dependent secondary electron emission yield due to ion and/or neutral impact electrodes. results for all show that most ionization occurs near plasma-sheath interfaces, little within plasma bulk region. Without electrons emitted from electrodes found play strong role in process. When included model, operation transitions ?-mode ?-mode, which nearly is electrons. Secondary production bombardment atoms was approximately14.7 times greater than bombardment. Electron ground state contributes about 76% total ionization; primary electrons, 11%; metastable Penning ionization, 13%; multi-step 0.3%.

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ژورنال

عنوان ژورنال: Plasma Sources Science and Technology

سال: 2021

ISSN: ['1361-6595', '0963-0252']

DOI: https://doi.org/10.1088/1361-6595/ac3ba1